Hardinge Manual Chucker (sourced) Hardinge QC-Quest 10/65 CNC Turning Center (sourced) Heidelberg MicroPG (sourced) Heidelberg MLA (sourced) Heidelberg uPG Laser Writer (sourced) Heidelberg uPG -Direct Write Pattern Generator (sourced) Heidelberg uPG Maskless Aligner (sourced). HEIDELBERG INSTRUMENTS µPG User Manual 13 System Startup and Shutdown STARTUP 1. At the System Supply Unit, switch on the µPG with the On/Off switch (19). The switch should light up. 2. Make sure that air pressure for the stage is applied and the lid is closed. The Safety Interlock lamp (12) should be off. 3. Heidelberg μPG Maskless Aligner 1. Introduction The µPG is a tabletop maskless aligner system (Figure 1). It can be used for direct-writing as well as for making photomasks. It uses nm LED light source and optical system comprising highly reflective mirrors and DMDTM (digital micro-mirror device). Figure 1: The µPG Maskless.
Leading the Industry. At YORK®, comfort is more than a feeling - it's a promise: to innovate, to assure and, most of all, to deliver. Find out how we leverage our unparalleled residential dealer network and world-class commercial support services to lead the industry. Residential Products. Residential Finance and Savings. Residential Warranties. The μPG is an extremely economical and easy to use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications such as MEMS, Bio MEMS, Integrated Optics, Micro Fluidics or any other application that requires high precision, high-resolution www.doorway.ru μPG offers a very small footprint of only 60 x 75 cm². Heidelberg uPG nm, 1um, 5um. Instrument types. Lithography. News. Shared instrumentation facilities: Benefiting researchers and universities, and sustaining research excellence. Making the Best of a Bad Situation: A Characterization Seminar Series.
The μPG offers a small footprint of only 60 x 75 cm², featuring a compact design with all electronic components integrated into the system. A personal computer is used as system control. The GUI based control software makes it easy for users to convert the de-signs, perform a manual or automatic alignment and start the exposure. HEIDELBERG INSTRUMENTS µPG User Manual 6 System Description The µPG lithography system consists of two units: the lithography unit, comprising optics, stage, write head and electronics, and the supply unit, which contains the power supplies as well as the compressed air conditioning. It is controlled via a standard PC. HEIDELBERG µPG LASER WRITER. The μPG is an easy-to-use micro pattern generator for direct writing applications and low volume mask making. The system can be used for applications like MEMS, BioMEMS, Integrated Optics, and Micro Fluidics. Address grid down to nm for the 3 μm. The µPG laser wavelength is nm.
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